Parylene-AF4 CVD coating equipment
1. Precursor: Parylene-AF4 dimer evaporation module
2. Chamber size: diameter 400mm × height 400mm
3. Loading content: 12pcs 8” Si-wafer loading fixture
Parylene-C/N CVD coating equipment
1. Precursor: Parylene-C/N dimer evaporation module
2. Chamber size: diameter 600mm × height 800mm
3. Loading content: 10 layers 370mm × 470mm loading fixture
